BNX-H DIELECTRIC LAYERS PREPARED BY FIELD-ASSISTED PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION

Authors
SALMAN EG KOSINOVA ML KORSHUNOV AN BADALYAN AM POLYAKOV OV RUMYANTSEV YM SYSOEVA NP FAINER NI
Citation
Eg. Salman et al., BNX-H DIELECTRIC LAYERS PREPARED BY FIELD-ASSISTED PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION, Inorganic materials, 31(12), 1995, pp. 1400-1403
Citations number
9
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
31
Issue
12
Year of publication
1995
Pages
1400 - 1403
Database
ISI
SICI code
0020-1685(1995)31:12<1400:BDLPBF>2.0.ZU;2-4