THE CHALLENGES OF COLOR FOR WAFER INSPECTION FROM THE VIEWPOINT OF PARTIALLY COHERENT IMAGING THEORY

Authors
HILD R NITZSCHE G ALTENBURGER U
Citation
R. Hild et al., THE CHALLENGES OF COLOR FOR WAFER INSPECTION FROM THE VIEWPOINT OF PARTIALLY COHERENT IMAGING THEORY, Microelectronic engineering, 26(3-4), 1995, pp. 195-215
Citations number
11
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
26
Issue
3-4
Year of publication
1995
Pages
195 - 215
Database
ISI
SICI code
0167-9317(1995)26:3-4<195:TCOCFW>2.0.ZU;2-S
Abstract
The challenges and the possibilities of colour image inspection are di scussed from the viewpoint of optical imaging theory. Object models fo r 3-D wafer structures and faults were developed to realize test wafer s and their imaging as a simulation tool. Coloured images are generate d to analyse the colour properties of such structures and faults.