MICROSTRUCTURAL CHARACTERIZATION OF THIN-FILMS OBTAINED BY LASER IRRADIATION

Authors
MENGUCCI P BARUCCA G MARZOCCHINI R LEGGIERI G
Citation
P. Mengucci et al., MICROSTRUCTURAL CHARACTERIZATION OF THIN-FILMS OBTAINED BY LASER IRRADIATION, Microscopy microanalysis microstructures, 6(5-6), 1995, pp. 685-692
Citations number
10
Categorie Soggetti
Spectroscopy,Microscopy
Journal title
Microscopy microanalysis microstructures → ACNP
ISSN journal
11542799
Volume
6
Issue
5-6
Year of publication
1995
Pages
685 - 692
Database
ISI
SICI code
1154-2799(1995)6:5-6<685:MCOTOB>2.0.ZU;2-#
Abstract
Thin films obtained by direct pulsed excimer laser irradiation and by laser reactive ablation were characterized by scanning electron micros copy, cross sectional transmission electron microscopy and grazing ang le X-ray diffraction. The results obtained were interpreted in functio n of the deposition parameters such as substrate temperature, pressure of the ambient atmosphere, number of laser pulses and laser fluence.