PAPERS FROM THE 39TH INTERNATIONAL-CONFERENCE ON ELECTRON, ION, AND PHOTON-BEAM TECHNOLOGY AND NANOFABRICATION - 30 MAY 2 JUNE 1995 - SCOTTSDALE CONFERENCE RESORT, SCOTTSDALE, ARIZONA - PREFACE

Authors
KERN D
Citation
D. Kern, PAPERS FROM THE 39TH INTERNATIONAL-CONFERENCE ON ELECTRON, ION, AND PHOTON-BEAM TECHNOLOGY AND NANOFABRICATION - 30 MAY 2 JUNE 1995 - SCOTTSDALE CONFERENCE RESORT, SCOTTSDALE, ARIZONA - PREFACE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2321-2321
Citations number
NO
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
6
Year of publication
1995
Pages
2321 - 2321
Database
ISI
SICI code
1071-1023(1995)13:6<2321:PFT3IO>2.0.ZU;2-#