STUDY OF SPACE-CHARGE DEVICES FOR FOCUSED ION-BEAM SYSTEMS

Authors
WANG L ORLOFF J TANG T
Citation
L. Wang et al., STUDY OF SPACE-CHARGE DEVICES FOR FOCUSED ION-BEAM SYSTEMS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2414-2418
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
6
Year of publication
1995
Pages
2414 - 2418
Database
ISI
SICI code
1071-1023(1995)13:6<2414:SOSDFF>2.0.ZU;2-6
Abstract
Axisymmetric and nonaxisymmetric electron space-charge lenses and sphe rical aberration correctors are studied theoretically. Many interestin g features of the space-charge devices are revealed by considering som e simple, but physically reasonable models. It is shown that a number of simple space-charge distributions can compensate for a large range of positive spherical aberrations. Several numerical examples are pres ented in some detail. (C) 1995 American Vacuum Society.