MAGNETIC FUNNELS FOR PROJECTION ELECTRON LITHOGRAPHY

Electrons moving in inhomogeneous magnetic fields, which are slowly va rying, behave like beads on a string. Because of this a converging mag netic funnel (MF) can be used to reduce an electron image in a way whi ch is physically very different from a conventional lens. We analyze a nd numerically simulate the trajectories of electrons in a realizable ME We show that such magnetic configurations are generally capable of projecting and reducing several cmi images with features in the 0.1 mu range. Distortions are <10(-6), there is good depth of focus (greater than or equal to 1 mu m), and spot sizes (less than or equal to 20 nm ) are achievable. (C) 1995 American Vacuum Society.