Jh. Das et Nc. Macdonald, MICROMACHINED FIELD-EMISSION CATHODE WITH AN INTEGRATED HEATER, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2432-2435
We report on the fabrication and operation of integrated micromachined
and suspended field emission cathode tips. The emitter tips are suspe
nded at the center of a silicon beam using multiple patterning methods
of high aspect ratio silicon structures using a single layer silicon
dioxide etch mask. The integrated, suspended silicide microheater is u
sed to clean and to activate the cathodes. The silicon tips are subseq
uently modified to improve their emission properties. The modified cat
hodes exhibit a significantly lower turn on voltage of about 50 V (sim
ilar to 100 V for silicon cathodes), and need no chemical tip cleaning
prior to emission. A much larger emission current with reduced emissi
on noise has been observed when a single tip is cycled through the tip
forming process. (C) 1995 American Vacuum Society.