ELECTRON-BEAM LITHOGRAPHY DIGITAL PATTERN GENERATOR AND ELECTRONICS FOR GENERALIZED CURVILINEAR STRUCTURES

A vector scan pattern generator, optimized for smooth curvilinear as w ell as rectilinear primitive shapes, has been designed and constructed . The pattern generator uses high-speed hardware to implement a set of second-order, quadratic equations to drive digital to analog converte rs and high-speed array processors to calculate the coefficients for t hese equations. The digital pattern generator package contains the hig h-speed digital, analog, and high-resolution analog electronics. The i nitial lithography results confirm the operation of the system and ste pping rates of 40 MHz have been achieved. (C) 1995 American Vacuum Soc iety.