NANOMETER LITHOGRAPHY ON SILICON AND HYDROGENATED AMORPHOUS-SILICON WITH LOW-ENERGY ELECTRONS

Authors
KRAMER N JORRITSMA J BIRK H SCHONENBERGER C
Citation
N. Kramer et al., NANOMETER LITHOGRAPHY ON SILICON AND HYDROGENATED AMORPHOUS-SILICON WITH LOW-ENERGY ELECTRONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 805-811
Citations number
22
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
805 - 811
Database
ISI
SICI code
1071-1023(1995)13:3<805:NLOSAH>2.0.ZU;2-9