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ENG
IMPROVED RETARDING-FIELD OPTICS VIA IMAGE OUTSIDE FIELD
Authors
HORDON LS
BOYER BB
PEASE RFW
Citation
Ls. Hordon et al., IMPROVED RETARDING-FIELD OPTICS VIA IMAGE OUTSIDE FIELD, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 826-832
Citations number
22
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
→
ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
826 - 832
Database
ISI
SICI code
1071-1023(1995)13:3<826:IROVIO>2.0.ZU;2-P