PATTERN-RECOGNITION OF TRENCH WIDTH USING A CONFOCAL MICROSCOPE

Authors
WANG YT SCHAPER CD KAILATH T
Citation
Yt. Wang et al., PATTERN-RECOGNITION OF TRENCH WIDTH USING A CONFOCAL MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 840-847
Citations number
9
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
840 - 847
Database
ISI
SICI code
1071-1023(1995)13:3<840:POTWUA>2.0.ZU;2-C