ALGORITHM METHOD OF CORRELATION POSITION FOR AUTOMATIC ALIGNMENT IN MICROCIRCUIT FABRICATION

Authors
WANG XD DU BC WANG L WU GW GE H
Citation
Xd. Wang et al., ALGORITHM METHOD OF CORRELATION POSITION FOR AUTOMATIC ALIGNMENT IN MICROCIRCUIT FABRICATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 858-861
Citations number
5
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
858 - 861
Database
ISI
SICI code
1071-1023(1995)13:3<858:AMOCPF>2.0.ZU;2-3