LOW-PRESSURE PLASMA DEPOSITION OF PHOTOSENSITIVE ORGANOSILICON POLYMERS

Authors
HAGEDORN MS HIGMAN TK FAYFIELD RT CHEN J
Citation
Ms. Hagedorn et al., LOW-PRESSURE PLASMA DEPOSITION OF PHOTOSENSITIVE ORGANOSILICON POLYMERS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 862-864
Citations number
10
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
862 - 864
Database
ISI
SICI code
1071-1023(1995)13:3<862:LPDOPO>2.0.ZU;2-8