IMPROVEMENTS IN THE WAVELENGTH STABILITY OF EVAPORATED TIO2 SIO2 ANTIREFLECTION COATINGS BY ION ASSISTANCE/

Authors
BHUMBRA BS THOMAS DJ GOODCHILD DP
Citation
Bs. Bhumbra et al., IMPROVEMENTS IN THE WAVELENGTH STABILITY OF EVAPORATED TIO2 SIO2 ANTIREFLECTION COATINGS BY ION ASSISTANCE/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 881-888
Citations number
10
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
881 - 888
Database
ISI
SICI code
1071-1023(1995)13:3<881:IITWSO>2.0.ZU;2-L