OPTIMIZATION OF REACTIVE ION ETCHING OF AL0.48IN0.52AS IN CH4 H-2 BY THE EXPERIMENTAL-DESIGN METHOD/

Authors
CARPI EL VANHOVE M ALAY JL VANROSSUM M
Citation
El. Carpi et al., OPTIMIZATION OF REACTIVE ION ETCHING OF AL0.48IN0.52AS IN CH4 H-2 BY THE EXPERIMENTAL-DESIGN METHOD/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 895-901
Citations number
6
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
895 - 901
Database
ISI
SICI code
1071-1023(1995)13:3<895:OORIEO>2.0.ZU;2-B