NANOMETER-SIZE SURFACE-FEATURES PRODUCED BY SINGLE, LOW-ENERGY, HIGHLY-CHARGED IONS

Authors
PARKS DC BASTASZ R SCHMIEDER RW STOCKLI M
Citation
Dc. Parks et al., NANOMETER-SIZE SURFACE-FEATURES PRODUCED BY SINGLE, LOW-ENERGY, HIGHLY-CHARGED IONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 941-948
Citations number
28
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
941 - 948
Database
ISI
SICI code
1071-1023(1995)13:3<941:NSPBSL>2.0.ZU;2-#