INTEGRATED FERROELECTRIC STRUCTURES FOR INFORMATION-STORAGE AND CCD MICROPROCESSOR DEVICES

Authors
PETROVSKY VI SIGOV AS
Citation
Vi. Petrovsky et As. Sigov, INTEGRATED FERROELECTRIC STRUCTURES FOR INFORMATION-STORAGE AND CCD MICROPROCESSOR DEVICES, Microelectronic engineering, 29(1-4), 1995, pp. 11-18
Citations number
28
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
29
Issue
1-4
Year of publication
1995
Pages
11 - 18
Database
ISI
SICI code
0167-9317(1995)29:1-4<11:IFSFIA>2.0.ZU;2-I
Abstract
The integration of ferroelectric thin films into the current technolog y of silicon-based ICs is discussed. A review is given on most widespr ead applications: Memory ICs, Pyroelectric Detectors, and Parallel Ana log Processors. Some prospects on future development of acoustoelectro nic devices with integrated ferroelectrics are discussed as well.