THE USE OF COMPOSITE PIEZOELECTRIC THICK-FILMS FOR ACTUATION AND CONTROL OF MINIATURE CANTILEVERS

Authors
JENKINS DFL CUNNINGHAM MJ CLEGG WW
Citation
Dfl. Jenkins et al., THE USE OF COMPOSITE PIEZOELECTRIC THICK-FILMS FOR ACTUATION AND CONTROL OF MINIATURE CANTILEVERS, Microelectronic engineering, 29(1-4), 1995, pp. 71-74
Citations number
10
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
29
Issue
1-4
Year of publication
1995
Pages
71 - 74
Database
ISI
SICI code
0167-9317(1995)29:1-4<71:TUOCPT>2.0.ZU;2-4
Abstract
A control and actuation system is described which utilises a single ac tive piezoelectric composite thick film and optical vibration sensing. This system enables unwanted vibrations of the cantilever to be cance lled, whilst maintaining the ability to deflect the cantilever statica lly or dynamically as required. The use of such piezoelectric elements in scanning probe microscopes is discussed.