Sol-gel and MOD processes have been developed to deposit SrTiO3 and la
yered perovskite films e.g. SrBi2Ta2O9 and SrBi2NbTaO9 on top of Si(10
0) substrates with Ti/Pt electrodes. Their processing and film morphol
ogy have been studied. The ferroelectric properties and the endurance
of the layered perovskites e.g. SrBi2Ta2O9 are shown.