SOL-GEL AND MOD PROCESSING OF LAYERED PEROVSKITE AND SRTIO3 FILMS

Authors
KLEE M MACKENS U
Citation
M. Klee et U. Mackens, SOL-GEL AND MOD PROCESSING OF LAYERED PEROVSKITE AND SRTIO3 FILMS, Microelectronic engineering, 29(1-4), 1995, pp. 185-188
Citations number
7
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
29
Issue
1-4
Year of publication
1995
Pages
185 - 188
Database
ISI
SICI code
0167-9317(1995)29:1-4<185:SAMPOL>2.0.ZU;2-O
Abstract
Sol-gel and MOD processes have been developed to deposit SrTiO3 and la yered perovskite films e.g. SrBi2Ta2O9 and SrBi2NbTaO9 on top of Si(10 0) substrates with Ti/Pt electrodes. Their processing and film morphol ogy have been studied. The ferroelectric properties and the endurance of the layered perovskites e.g. SrBi2Ta2O9 are shown.