MEASUREMENT OF CARBON CONTAMINATION IN BARIUM STRONTIUM-TITANATE FILMS

Authors
STANNARD WB JOHNSTON PN SCOTT JF BUBB IF WALKER SR COHEN DD DYTLEWSKI N MARTIN JW
Citation
Wb. Stannard et al., MEASUREMENT OF CARBON CONTAMINATION IN BARIUM STRONTIUM-TITANATE FILMS, Microelectronic engineering, 29(1-4), 1995, pp. 193-196
Citations number
9
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
29
Issue
1-4
Year of publication
1995
Pages
193 - 196
Database
ISI
SICI code
0167-9317(1995)29:1-4<193:MOCCIB>2.0.ZU;2-Z
Abstract
Ferroelectric films are being developed for use in DRAMs. The films ar e often manufactured using spin-on techniques making contamination wit h residual carbon inevitable. The concentration of carbon is rarely kn own and its effect not yet understood. This paper describes the analys is of barium strontium titanate (BST) films for carbon content using b oth Mass and Energy Dispersive Recoil Spectrometry (RS) with 77 MeV I- 127 ions and Nuclear Reaction Analysis (NRA) using the C-12(He-3,p(0)) N-14 reaction.