THE SCANNING ELECTRON-MICROSCOPY INVESTIGATION OF LITAO3 THIN-FILMS ON SILICON SUBSTRATES

Authors
VOLKOV VT KOKHANCHIK LS MATVEEV VN NOSENKO SV
Citation
Vt. Volkov et al., THE SCANNING ELECTRON-MICROSCOPY INVESTIGATION OF LITAO3 THIN-FILMS ON SILICON SUBSTRATES, Microelectronic engineering, 29(1-4), 1995, pp. 305-308
Citations number
10
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
29
Issue
1-4
Year of publication
1995
Pages
305 - 308
Database
ISI
SICI code
0167-9317(1995)29:1-4<305:TSEIOL>2.0.ZU;2-K
Abstract
The fabrication of LiTaO3 films on Si(lll) by r.f. by X-ray diffractio n and SEM techniques. The local using e-beam sample charging.