TRANSMISSION ELECTRON-MICROSCOPY OF EPITAXIAL SRTIO3 FILMS ON LAALO3 SUBSTRATES

Authors
RYEN L OLSSON E MADSEN LD JOHNSON CN WANG X JACOBSEN SN HELMERSSON U RUDNER S WERNLUND LD
Citation
L. Ryen et al., TRANSMISSION ELECTRON-MICROSCOPY OF EPITAXIAL SRTIO3 FILMS ON LAALO3 SUBSTRATES, Microelectronic engineering, 29(1-4), 1995, pp. 309-312
Citations number
7
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
29
Issue
1-4
Year of publication
1995
Pages
309 - 312
Database
ISI
SICI code
0167-9317(1995)29:1-4<309:TEOESF>2.0.ZU;2-0
Abstract
Three different epitaxial (001) SrTiO3 films deposited on (110)(rhombo hedral) LaAlO3 substrates by rf sputtering, have been characterised us ing transmission electron microscopy (TEM). The films exhibited differ ent columnar subgrain morphologies with column widths ranging from 7 t o 19 nm. Slow cooling in an O-2 ambient and in situ annealing at eleva ted temperature improved the films dielectric tunability and this coul d be correlated to more narrow column dimensions.