INVESTIGATIONS OF ARTIFICIAL NANOSTRUCTURES AND LITHOGRAPHY TECHNIQUES WITH A SCANNING PROBE MICROSCOPE

Authors
GRIESINGER UA KADEN C LICHTENSTEIN N HOMMEL J LEHR G BERGMANN R MENSCHIG A SCHWEIZER H HILLMER H KOOPS HWP KRETZ J RUDOLPH M
Citation
Ua. Griesinger et al., INVESTIGATIONS OF ARTIFICIAL NANOSTRUCTURES AND LITHOGRAPHY TECHNIQUES WITH A SCANNING PROBE MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2441-2445
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
11
Issue
6
Year of publication
1993
Pages
2441 - 2445
Database
ISI
SICI code
1071-1023(1993)11:6<2441:IOANAL>2.0.ZU;2-U
Abstract
In this article, the examination and realization of nanometer structur es by an atomic force and a scanning tunneling microscope (AFM/STM) is reported. Nanometer structures [etched wires and gratings for distrib uted feedback (DFB) lasers] were investigated down to a width of 50 nm with respect to profile, structure height, and sidewall roughness. Sp ecial DFB gratings for fine tuning of the emission wavelength are anal yzed with respect to Fourier components of the periodic structure. The use of a STM and an AFM for low voltage electron-beam lithography of artificial nanometer structures will be demonstrated.