STRUCTURAL-ANALYSIS OF HYDROGENATED CARBON-FILMS OBTAINED BY REACTIVEDIRECT-CURRENT MAGNETRON SPUTTERING

Amorphous hydrogenated carbon films were prepared by reactive direct c urrent magnetron sputtering in argon plasma containing methane as the reactant gas. The films were characterized using various spectroscopic measurements such as Raman scattering, optical absorption spectroscop y in the ultraviolet-visible region, and infrared (IR) absorption spec troscopy. The spectral analyses indicated that changes in Raman spectr oscopy intensity occurring with increasing methane gas content were de termined to be caused by changes in optically resonant components in t he films. Furthermore, a significant correlation was seen between the relative intensity of IR peaks and wear durability. (C) 1996 American Vacuum Society.