SUBSTRATE EFFECTS IN CUBIC BORON-NITRIDE FILM FORMATION

We have examined the effect of the substrate in cubic boron nitride (c -BN) film synthesis by depositing BN films on a variety of materials u sing ion-assisted pulsed laser deposition. Using optical modeling, we estimated the c-BN content of the films from the measured infrared ref lectance spectra. We find less c-BN in films grown on metal substrates than in films grown on Si and SiC/Si substrates. The c-BN content of the films decreased with decreasing substrate microhardness. This resu lt is qualitatively consistent with the model of stress-induced c-BN f ilm formation. (C) 1996 American Vacuum Society.