DIMENSIONAL METROLOGY WITH SCANNING PROBE MICROSCOPES

Authors
GRIFFITH JE MARCHMAN HM MILLER GL HOPKINS LC
Citation
Je. Griffith et al., DIMENSIONAL METROLOGY WITH SCANNING PROBE MICROSCOPES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1100-1105
Citations number
33
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
1100 - 1105
Database
ISI
SICI code
1071-1023(1995)13:3<1100:DMWSPM>2.0.ZU;2-6