OPTICAL PROBE MICROSCOPE FOR NONDESTRUCTIVE METROLOGY OF LARGE-SAMPLESURFACES

Authors
MARCHMAN HM GRIFFITH JE TRAUTMAN JK
Citation
Hm. Marchman et al., OPTICAL PROBE MICROSCOPE FOR NONDESTRUCTIVE METROLOGY OF LARGE-SAMPLESURFACES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1106-1111
Citations number
13
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
1106 - 1111
Database
ISI
SICI code
1071-1023(1995)13:3<1106:OPMFNM>2.0.ZU;2-V