NOVEL METHOD FOR PRODUCING NANOSTRUCTURES IN SILICON INVERSION-LAYERS

Authors
CAMPBELL BE HUANG X BERNSTEIN GH
Citation
Be. Campbell et al., NOVEL METHOD FOR PRODUCING NANOSTRUCTURES IN SILICON INVERSION-LAYERS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1135-1138
Citations number
20
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
1135 - 1138
Database
ISI
SICI code
1071-1023(1995)13:3<1135:NMFPNI>2.0.ZU;2-M