PROPERTIES OF ULTRATHIN FILMS OF POROUS SILICON

Authors
VONBEHREN J UCER KB TSYBESKOV L VANDYSHEV JV FAUCHET PM
Citation
J. Vonbehren et al., PROPERTIES OF ULTRATHIN FILMS OF POROUS SILICON, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1225-1229
Citations number
21
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
1225 - 1229
Database
ISI
SICI code
1071-1023(1995)13:3<1225:POUFOP>2.0.ZU;2-9