ENHANCEMENT AND SUPPRESSION OF THE FORMATION OF POROUS SILICON

Authors
DUTTAGUPTA SP PENG C FAUCHET PM KURINEC SK BLANTON TN
Citation
Sp. Duttagupta et al., ENHANCEMENT AND SUPPRESSION OF THE FORMATION OF POROUS SILICON, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1230-1235
Citations number
15
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
1230 - 1235
Database
ISI
SICI code
1071-1023(1995)13:3<1230:EASOTF>2.0.ZU;2-R