ATOMIC-FORCE MICROSCOPE AS A TOOL FOR METAL-SURFACE MODIFICATIONS

Authors
GOBEL H VONBLANCKENHAGEN P
Citation
H. Gobel et P. Vonblanckenhagen, ATOMIC-FORCE MICROSCOPE AS A TOOL FOR METAL-SURFACE MODIFICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1247-1251
Citations number
24
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
1247 - 1251
Database
ISI
SICI code
1071-1023(1995)13:3<1247:AMAATF>2.0.ZU;2-8