CLUSTER BEAMS FROM A CO-ND LIQUID ALLOY ION-SOURCE

A Cobalt-Neodymium Liquid Alloy Ion Source (LAIS) is investigated with respect to its cluster emission behaviour. Clusters and molecular ion s were found. The influence of the source emission current on the clus ter emission intensity and also on the cluster mass distribution is st udied. The Go-Nd LAIS was used for writing patterning (implantation, s puttering) in a mass-selecting Focused Cluster Beam (FCB) system. Theo retical estimations were carried out concerning the use of the FCB for direct deposition at landing energies of about 100 eV / atom. First e xperimental results of cobalt FCBs are presented.