FABRICATION OF PERIODICAL NANOSTRUCTURES USING ELECTRON INTERFERENCE-FRINGES

Authors
FUJITA S MARUNO S WATANABE H KUSUMI Y ICHIKAWA M
Citation
S. Fujita et al., FABRICATION OF PERIODICAL NANOSTRUCTURES USING ELECTRON INTERFERENCE-FRINGES, Microelectronic engineering, 30(1-4), 1996, pp. 435-438
Citations number
12
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
30
Issue
1-4
Year of publication
1996
Pages
435 - 438
Database
ISI
SICI code
0167-9317(1996)30:1-4<435:FOPNUE>2.0.ZU;2-S
Abstract
A scanning interference electron microscope (SIEM) has been developed for periodical nanostructure fabrication. This system produce electron interference fringes with a period from 2 nm to several ten Fabricati ons of periodical nanostructures with 23 to 170 nm period have been de monstrated by transferring electron interference fringe onto semicondu ctor surfaces.