MICROMACHINED ULTRASONIC AIR-TRANSDUCERS (MUTS)

Authors
SPOLIANSKY D LADABAUM I KHURIYAKUB BT
Citation
D. Spoliansky et al., MICROMACHINED ULTRASONIC AIR-TRANSDUCERS (MUTS), Microelectronic engineering, 30(1-4), 1996, pp. 535-538
Citations number
2
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
30
Issue
1-4
Year of publication
1996
Pages
535 - 538
Database
ISI
SICI code
0167-9317(1996)30:1-4<535:MUA(>2.0.ZU;2-D
Abstract
We report work on a new type of ultrasonic transducers, Micromachined Ultrasonic Air-Transducers, which offer a very promising alternative t o piezo-electric transducers thanks to micromachining technology. Expe riments show that very high frequency signals (11 MHz) can be emitted and detected in air using MUTs. Theoretical explanation for the behavi or of MUTs is proposed. It agrees well with experimental results. Opti mization will eventually lead to exciting applications of MUTs in medi cal imaging and non destructive evaluation.