APPLICATIONS OF POLYIMIDE MEMBRANES TO MEMS TECHNOLOGY

Authors
SHEARWOOD C HARRADINE MA BIRCH TS STEVENS JC
Citation
C. Shearwood et al., APPLICATIONS OF POLYIMIDE MEMBRANES TO MEMS TECHNOLOGY, Microelectronic engineering, 30(1-4), 1996, pp. 547-550
Citations number
4
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
30
Issue
1-4
Year of publication
1996
Pages
547 - 550
Database
ISI
SICI code
0167-9317(1996)30:1-4<547:AOPMTM>2.0.ZU;2-7
Abstract
The fabrication of polyimide membranes on GaAs (001) substrates by bul k micro-machining is described. These membranes have diameters in the range of 1 mm to 8 mm and a thickness of 7 mu m. The predicted and mea sured performance of a representative number of membranes is presented ; their application is illustrated with reference to a ''micro-speaker '' for use in a hearing aid.