REFLECTION NEAR-FIELD OPTICAL MICROSCOPY OF LATENT IMAGES IN PHOTORESISTS

Authors
SCHIAVONE P BERGOSSI O SPAJER M
Citation
P. Schiavone et al., REFLECTION NEAR-FIELD OPTICAL MICROSCOPY OF LATENT IMAGES IN PHOTORESISTS, Microelectronic engineering, 30(1-4), 1996, pp. 571-574
Citations number
9
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
30
Issue
1-4
Year of publication
1996
Pages
571 - 574
Database
ISI
SICI code
0167-9317(1996)30:1-4<571:RNOMOL>2.0.ZU;2-#
Abstract
This paper presents the preliminary results of the use of near-field o ptical microscopy for the observation of latent images in photoresists . It is shown that the refractive index change between exposed and une xposed regions is detected with a good contrast not always related to topography. Sub half-wavelength resolution capability is demonstrated.