INDIRECT TIP FABRICATION FOR SCANNING PROBE MICROSCOPY

Different fabrication technologies for Scanning Probe Microscopy tips have been investigated, using the so called mould technique. By a comb ination of reactive ion etching and wet anisotropic etching novel, hig h aspect ratio tip moulds have been produced in silicon. The resulting tip shapes are investigated by electroplating a nickel layer on the s ilicon substrate, whereafter the silicon is removed, yielding conducti ve tips, which can be used for Atomic Force Microscopy as well as Scan ning Tunnelling Microscopy.