THE INCAM SYSTEM - AN ADEQUATE IC MANUFACTURING CONCEPT FOR THE 21ST-CENTURY

Authors
DOCHE C
Citation
C. Doche, THE INCAM SYSTEM - AN ADEQUATE IC MANUFACTURING CONCEPT FOR THE 21ST-CENTURY, Microelectronic engineering, 30(1-4), 1996, pp. 605-605
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
30
Issue
1-4
Year of publication
1996
Pages
605 - 605
Database
ISI
SICI code
0167-9317(1996)30:1-4<605:TIS-AA>2.0.ZU;2-T