NANOLITHOGRAPHIC PATTERNING OF AU FILMS WITH A SCANNING TUNNELING MICROSCOPE

Authors
VANHAESENDONCK C STOCKMAN L NEUTTIENS G STRUNK C BRUYNSERAEDE Y
Citation
C. Vanhaesendonck et al., NANOLITHOGRAPHIC PATTERNING OF AU FILMS WITH A SCANNING TUNNELING MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1290-1293
Citations number
17
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
1290 - 1293
Database
ISI
SICI code
1071-1023(1995)13:3<1290:NPOAFW>2.0.ZU;2-1