SCANNING PROBE LITHOGRAPHY OF NOVEL LANGMUIR-SCHAEFER FILMS - ELECTROCHEMICAL APPLICATIONS

Authors
DEMIR U BALASUBRAMANIAN KK CAMMARATA V SHANNON C
Citation
U. Demir et al., SCANNING PROBE LITHOGRAPHY OF NOVEL LANGMUIR-SCHAEFER FILMS - ELECTROCHEMICAL APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1294-1299
Citations number
31
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
1294 - 1299
Database
ISI
SICI code
1071-1023(1995)13:3<1294:SPLONL>2.0.ZU;2-F