FABRICATION OF NANOMETER-SCALE STRUCTURES ON INSULATORS AND IN MAGNETIC-MATERIALS USING A SCANNING PROBE MICROSCOPE

Authors
HOSAKA S KOYANAGI H KIKUKAWA A MIYAMOTO M IMURA R USHIYAMA J
Citation
S. Hosaka et al., FABRICATION OF NANOMETER-SCALE STRUCTURES ON INSULATORS AND IN MAGNETIC-MATERIALS USING A SCANNING PROBE MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1307-1311
Citations number
16
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
1307 - 1311
Database
ISI
SICI code
1071-1023(1995)13:3<1307:FONSOI>2.0.ZU;2-B