NANOFABRICATION WITH A SCANNING TUNNELING MICROSCOPE USING CHEMICAL-VAPOR-DEPOSITION

Authors
RUBEL S WANG XD DELOZANNE AL
Citation
S. Rubel et al., NANOFABRICATION WITH A SCANNING TUNNELING MICROSCOPE USING CHEMICAL-VAPOR-DEPOSITION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1332-1336
Citations number
8
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
1332 - 1336
Database
ISI
SICI code
1071-1023(1995)13:3<1332:NWASTM>2.0.ZU;2-8