PZT, PLZT, LSC AND PLATINUM THIN-FILMS PRODUCED IN THE OPEN ATMOSPHERE USING COMBUSTION CHEMICAL-VAPOR-DEPOSITION

PZT, PLZT, LSC, and Pt thin film coatings have been deposited onto cry stalline and amorphous substrates using the open atmosphere Combustion Chemical Vapor Deposition (CCVD(SM)) technique. X-ray diffraction (XR D) scans have indicated a high degree of preferred orientation for all of these coatings. Furthermore, XRD pole figure analysis has shown th at coatings deposited onto single crystal substrates are single phase, while depositions onto amorphous substrates yield coatings with a fib er axis. Entrapment of airborne particles into the flame caused enough film inhomogeneity that electrical measurements could not be performe d at this stage.