S. Hoffmann et al., STRUCTURAL AND ELECTRICAL-PROPERTIES OF WET-CHEMICALLY DEPOSITED SR(TI1-YZRY)O-3 (Y=0...1) THIN-FILMS, Integrated ferroelectrics, 10(1-4), 1995, pp. 155-164
Polycrystalline thin films of SrTiO3 - SrZrO3 solid solutions were pre
pared along a new wet-chemical deposition route using beta-diketone an
d propandiole as chelating agents. The structural properties of the fi
lms were studied by X-ray diffraction analysis, scanning and transmiss
ion electron microscopy. The thin film density was correlated with the
permittivity using Maxwell's dispersion rule. The temperature coeffic
ient of the capacitance as well as the dielectric losses were studied.
Using transient impedance analysis, the dielectric relaxation, leakag
e, and resistance degradation of the thin films were investigated with
respect to the Ti/Zr ratio.