STRUCTURAL AND ELECTRICAL-PROPERTIES OF WET-CHEMICALLY DEPOSITED SR(TI1-YZRY)O-3 (Y=0...1) THIN-FILMS

Authors
HOFFMANN S KLEE M WASER R
Citation
S. Hoffmann et al., STRUCTURAL AND ELECTRICAL-PROPERTIES OF WET-CHEMICALLY DEPOSITED SR(TI1-YZRY)O-3 (Y=0...1) THIN-FILMS, Integrated ferroelectrics, 10(1-4), 1995, pp. 155-164
Citations number
23
Categorie Soggetti
Physics, Condensed Matter","Engineering, Eletrical & Electronic","Physics, Applied
Journal title
Integrated ferroelectrics → ACNP
ISSN journal
10584587
Volume
10
Issue
1-4
Year of publication
1995
Pages
155 - 164
Database
ISI
SICI code
1058-4587(1995)10:1-4<155:SAEOWD>2.0.ZU;2-R
Abstract
Polycrystalline thin films of SrTiO3 - SrZrO3 solid solutions were pre pared along a new wet-chemical deposition route using beta-diketone an d propandiole as chelating agents. The structural properties of the fi lms were studied by X-ray diffraction analysis, scanning and transmiss ion electron microscopy. The thin film density was correlated with the permittivity using Maxwell's dispersion rule. The temperature coeffic ient of the capacitance as well as the dielectric losses were studied. Using transient impedance analysis, the dielectric relaxation, leakag e, and resistance degradation of the thin films were investigated with respect to the Ti/Zr ratio.