AN OPTICAL STUDY OF PZT THIN-FILM CAPACITORS

Authors
PETERSON CR MANSOUR SA BEMENT A
Citation
Cr. Peterson et al., AN OPTICAL STUDY OF PZT THIN-FILM CAPACITORS, Integrated ferroelectrics, 10(1-4), 1995, pp. 295-300
Citations number
10
Categorie Soggetti
Physics, Condensed Matter","Engineering, Eletrical & Electronic","Physics, Applied
Journal title
Integrated ferroelectrics → ACNP
ISSN journal
10584587
Volume
10
Issue
1-4
Year of publication
1995
Pages
295 - 300
Database
ISI
SICI code
1058-4587(1995)10:1-4<295:AOSOPT>2.0.ZU;2-9
Abstract
PZT thin film capacitors with the composition Pb(Zr0.53Ti0.47)O-3 were deposited via metallo-organic decomposition (MOD) and rapid thermally processed (RTP) at a substrate temperature of 825 degrees C. The phot o-response of these capacitors was determined by measuring the change in saturation polarization and resistance as a function of incident ph oton energy prior to and after fatigue testing. We propose that photo- generated free carriers can screen and/or recombine with trapped charg e which restores local charge equilibrium within the PZT capacitor and hence, temporarily restores polarization.