HIGH-FREQUENCY DIELECTRIC-PROPERTIES OF THIN-FILM PZT CAPACITORS

Authors
WILLIAMSON W GILBERT BK CHEN HD UDAYAKUMAR KR CROSS LE BOZLER CM
Citation
W. Williamson et al., HIGH-FREQUENCY DIELECTRIC-PROPERTIES OF THIN-FILM PZT CAPACITORS, Integrated ferroelectrics, 10(1-4), 1995, pp. 335-342
Citations number
9
Categorie Soggetti
Physics, Condensed Matter","Engineering, Eletrical & Electronic","Physics, Applied
Journal title
Integrated ferroelectrics → ACNP
ISSN journal
10584587
Volume
10
Issue
1-4
Year of publication
1995
Pages
335 - 342
Database
ISI
SICI code
1058-4587(1995)10:1-4<335:HDOTPC>2.0.ZU;2-I
Abstract
We present a method for calculating the dielectric constant and the di ssipation factor for thin-film ferroelectric capacitors from scatterin g parameter measurements at multi-gigahertz frequencies. Physical meas urement is discussed along with description of the model upon which th e calculation is based. Experimental results for 0.5 micron films of P ZT are reported up to 15 GHz. Direct measurement is compared with indi rectly calculated values at the 100 MHz to 1.5 GHz range, showing exce llent agreement.