ATOMIC-FORCE MICROSCOPE LITHOGRAPHY USING AMORPHOUS-SILICON AS A RESIST AND ADVANCES IN PARALLEL OPERATION

Authors
MINNE SC FLUECKIGER P SOH HT QUATE CF
Citation
Sc. Minne et al., ATOMIC-FORCE MICROSCOPE LITHOGRAPHY USING AMORPHOUS-SILICON AS A RESIST AND ADVANCES IN PARALLEL OPERATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1380-1385
Citations number
16
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
3
Year of publication
1995
Pages
1380 - 1385
Database
ISI
SICI code
1071-1023(1995)13:3<1380:AMLUAA>2.0.ZU;2-2