PREPARATION OF SHARP POLYCRYSTALLINE TUNGSTEN TIPS FOR SCANNING-TUNNELING-MICROSCOPY IMAGING

Authors
Citation
R. Zhang et Dg. Ivey, PREPARATION OF SHARP POLYCRYSTALLINE TUNGSTEN TIPS FOR SCANNING-TUNNELING-MICROSCOPY IMAGING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 1-10
Citations number
56
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
14
Issue
1
Year of publication
1996
Pages
1 - 10
Database
ISI
SICI code
1071-1023(1996)14:1<1:POSPTT>2.0.ZU;2-W
Abstract
The fabrication of scanning tunneling microscopy (STM) tips by de down ward electrochemical polishing and ion milling has been investigated. The influence of parameters, such as voltage, immersion depth, cutoff time? and solution concentration, on the shape and sharpness of electr opolished W tips are presented. Both electropolished and ion milled ti ps, which were characterized by transmission electron microscopy !TEM! , were tested on Au films deposited on [100] oriented Si. The effects of tip radius on STM images are discussed thoroughly, and the results are also compared to atomic force microscopy (AFM) and TEM images. (C) 1996 American Vacuum Society.