R. Zhang et Dg. Ivey, PREPARATION OF SHARP POLYCRYSTALLINE TUNGSTEN TIPS FOR SCANNING-TUNNELING-MICROSCOPY IMAGING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 1-10
The fabrication of scanning tunneling microscopy (STM) tips by de down
ward electrochemical polishing and ion milling has been investigated.
The influence of parameters, such as voltage, immersion depth, cutoff
time? and solution concentration, on the shape and sharpness of electr
opolished W tips are presented. Both electropolished and ion milled ti
ps, which were characterized by transmission electron microscopy !TEM!
, were tested on Au films deposited on [100] oriented Si. The effects
of tip radius on STM images are discussed thoroughly, and the results
are also compared to atomic force microscopy (AFM) and TEM images. (C)
1996 American Vacuum Society.