D. Mariolle et al., NEW AND SIMPLE METHOD OF CONTACT PROCESSING CHARACTERIZATION USING ATOMIC-FORCE MICROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 22-29
This article reports on the use of atomic force microscopy coupled wit
h a simple wet chemical sample preparation to characterize processes i
nvolved in the realization of 0.4 mu m metal on silicon contacts. Phot
olithography and contact etching processes both lead to high aspect ra
tio topography (>4). The samples are imaged after a preparation which
removes the high aspect ratio and leads to a better image. The main pa
rameters of this new procedure are highlighted in this report, namely
contact area for lithography and etching processes and silicon consump
tion for the etching process. The contact silicidation process is also
monitored, and the electrical results are correlated with the silicid
e thickness formed in the contact. (C) 1996 American Vacuum Society.