Jj. Fijol et al., EX-SITU FORMATION OF HGSE ELECTRICAL CONTACTS TO P-ZNSE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 159-166
A novel method of forming semimetal HgSe electrical contacts to p-type
ZnSe through an ex situ growth process has been developed. The ex sit
u process consisted of deposition of an amorphous Se capping layer on
p-ZnSe prior to removal from the molecular beam epitaxy (MBE) growth c
hamber. This capping layer protected the p-ZnSe from contamination and
oxidation upon removal from the MBE growth chamber. This capping laye
r was reacted with Hg to form HgSe by heating to 150 degrees C for sim
ilar to 15 min in Hg vapor. Transmission electron microscopy and x-ray
diffraction data showed that the cubic HgSe phase was formed. Auger s
putter depth profiling data were consistent with the formation of stoi
chiometric HgSe. The electrical characteristics of the contacts were s
tudied using temperature dependent I-V measurements which showed that
thermionic emission dominated conduction across the interface for low
reverse biases (V-R<2.5 V). However, thermionic field emission dominat
ed conduction for V-R>2.5 V. The barrier height for thermionic emissio
n and the energy parameter for tunneling were determined to be similar
to 0.55 and 0.0076 eV, respectively, consistent with an unpinned Ferm
i level. (C) 1996 American Vacuum Society.