EX-SITU FORMATION OF HGSE ELECTRICAL CONTACTS TO P-ZNSE

Citation
Jj. Fijol et al., EX-SITU FORMATION OF HGSE ELECTRICAL CONTACTS TO P-ZNSE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 159-166
Citations number
27
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
14
Issue
1
Year of publication
1996
Pages
159 - 166
Database
ISI
SICI code
1071-1023(1996)14:1<159:EFOHEC>2.0.ZU;2-T
Abstract
A novel method of forming semimetal HgSe electrical contacts to p-type ZnSe through an ex situ growth process has been developed. The ex sit u process consisted of deposition of an amorphous Se capping layer on p-ZnSe prior to removal from the molecular beam epitaxy (MBE) growth c hamber. This capping layer protected the p-ZnSe from contamination and oxidation upon removal from the MBE growth chamber. This capping laye r was reacted with Hg to form HgSe by heating to 150 degrees C for sim ilar to 15 min in Hg vapor. Transmission electron microscopy and x-ray diffraction data showed that the cubic HgSe phase was formed. Auger s putter depth profiling data were consistent with the formation of stoi chiometric HgSe. The electrical characteristics of the contacts were s tudied using temperature dependent I-V measurements which showed that thermionic emission dominated conduction across the interface for low reverse biases (V-R<2.5 V). However, thermionic field emission dominat ed conduction for V-R>2.5 V. The barrier height for thermionic emissio n and the energy parameter for tunneling were determined to be similar to 0.55 and 0.0076 eV, respectively, consistent with an unpinned Ferm i level. (C) 1996 American Vacuum Society.